Title :
Wire detection using single-slit diffraction
Author :
Xiao, Yong ; Zhu, Kuanyi ; Zhang, Chi
Author_Institution :
Coll. of Inf. Eng., Shenyang Uni. of Chem. Technol., Shenyang, China
Abstract :
This paper presents a wire detection method using single-slit diffraction. A laser head generates the light beam, and an optical slit is introduced in the path of light source to a wire, so that diffraction pattern generated by the slit will be projected to the receiving screen, and irradiance loss could be observed, due to the presence of a wire. Simulation result demonstrates that the design can render certain detection sensitivity for slim wires.
Keywords :
inspection; integrated circuit interconnections; optical sensors; detection sensitivity; diffraction pattern; inspection; interconnect; irradiance loss; single-slit diffraction; wire detection; Bonding; Diffraction; Laser beams; Microelectronics; Optical diffraction; Wires; Diffraction; irradiance; slit; wire detection;
Conference_Titel :
Electric Information and Control Engineering (ICEICE), 2011 International Conference on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-8036-4
DOI :
10.1109/ICEICE.2011.5777594