DocumentCode
3280106
Title
Utilizing electromagnetic-acoustic resonators for liquid level sensing
Author
Lucklum, Frieder ; Jakoby, Bernhard
Author_Institution
Inst. for Microelectron. & Microsensors, Johannes Kepler Univ. Linz, Linz, Austria
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
217
Lastpage
221
Abstract
Electromagnetic excitation of acoustic resonators sensors as an alternative to piezoelectric and capacitive acoustic sensors provides unique benefits of remote, multi-mode measurements. Utilizing out-of-plane modes of vibration, we have employed the devices as liquid level sensors. The resolution is not limited by the wavelength (as for time-of-flight ultrasonic sensors), since small frequency changes due to interference effects of the generated acoustic wave are evaluated. With standard lab equipment, a liquid level resolution as low as 3 ¿m at 275 kHz has been achieved. To describe the physical mechanisms and predict measurement results, we present a refined model of the electromechanical interaction and compare simulated and experimental results. The model is based on an equivalent circuit description, where the compressional acoustic wave in the liquid is described as a lossy transmission line with an acoustic impedance depending on the liquid´s properties.
Keywords
acoustic resonators; acoustic transducers; electromagnetic devices; equivalent circuits; level measurement; transmission line theory; ultrasonic transducers; acoustic impedance; capacitive acoustic sensors; compressional acoustic wave; electromagnetic-acoustic resonator sensors; electromechanical interaction; equivalent circuit description; frequency 275 kHz; liquid level sensing; lossy transmission line; multimode measurements; out-of-plane modes; piezoelectric sensors; time-of-flight ultrasonic sensors; Acoustic devices; Acoustic measurements; Acoustic sensors; Acoustic waves; Capacitive sensors; Electromagnetic measurements; Level control; Predictive models; Ultrasonic variables measurement; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2009 IEEE
Conference_Location
Christchurch
ISSN
1930-0395
Print_ISBN
978-1-4244-4548-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2009.5398188
Filename
5398188
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