Title :
The millimeter-wave detector using vanadium oxide with planar structure antenna
Author :
Kim, Ji-Hong ; Hong, Sung-Min ; Lee, Kyung-Il ; Lee, Dae-Sung ; Moon, Byung-Moo ; Hwang, Hak-In
Author_Institution :
Dept. of Electr. Eng., Korea Univ., Seoul
Abstract :
We have developed a new millimeter-wave detector. The detector consists of a micro bolometric detecting part, a micro heater and a micro antenna. Vanadium oxide thin film was deposited for thermal detecting materials. The micro log-periodic bow-tie antenna having resonance frequency of 140 GHz was designed and simulated. The antenna coupled detectors were fabricated by MEMS technology. The fabricated detector showed resonance frequency of 140 GHz which is the same as simulation result and large TCR value of 4%.
Keywords :
bolometers; insulating thin films; micromechanical devices; millimetre wave detectors; planar antennas; vanadium compounds; MEMS technology; frequency 140 GHz; micro log-periodic bow-tie antenna; microbolometer; microheater; millimeter-wave detector; planar structure antenna; thermal detecting materials; vanadium oxide thin film; Antenna measurements; Broadband antennas; Detectors; Image sensors; Micromechanical devices; Millimeter wave technology; Resonance; Resonant frequency; Silicon; Sputtering;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on
Conference_Location :
Pasadena, CA
Print_ISBN :
978-1-4244-2119-0
Electronic_ISBN :
978-1-4244-2120-6
DOI :
10.1109/ICIMW.2008.4665806
