The millimeter-wave detector using vanadium oxide with planar structure antenna

Author

Kim, Ji-Hong ; Hong, Sung-Min ; Lee, Kyung-Il ; Lee, Dae-Sung ; Moon, Byung-Moo ; Hwang, Hak-In

Author_Institution

Dept. of Electr. Eng., Korea Univ., Seoul

fYear

2008

fDate

15-19 Sept. 2008

Firstpage

1

Lastpage

2

Abstract

We have developed a new millimeter-wave detector. The detector consists of a micro bolometric detecting part, a micro heater and a micro antenna. Vanadium oxide thin film was deposited for thermal detecting materials. The micro log-periodic bow-tie antenna having resonance frequency of 140 GHz was designed and simulated. The antenna coupled detectors were fabricated by MEMS technology. The fabricated detector showed resonance frequency of 140 GHz which is the same as simulation result and large TCR value of 4%.

Keywords

bolometers; insulating thin films; micromechanical devices; millimetre wave detectors; planar antennas; vanadium compounds; MEMS technology; frequency 140 GHz; micro log-periodic bow-tie antenna; microbolometer; microheater; millimeter-wave detector; planar structure antenna; thermal detecting materials; vanadium oxide thin film; Antenna measurements; Broadband antennas; Detectors; Image sensors; Micromechanical devices; Millimeter wave technology; Resonance; Resonant frequency; Silicon; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on

Conference_Location

Pasadena, CA

Print_ISBN

978-1-4244-2119-0

Electronic_ISBN

978-1-4244-2120-6

Type

conf

DOI

10.1109/ICIMW.2008.4665806

Filename

4665806