DocumentCode
3280483
Title
Sensitivity improvement of MEMS-based tilt sensor using air medium
Author
Jung, Dae Woong ; Choi, Ju Chan ; Lee, June Kyoo ; Jung, Ho ; Kong, Seong Ho
Author_Institution
Sch. of Electr. Eng. & Comput. Sci., Kyungpook Nat. Univ., Daegu, South Korea
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
164
Lastpage
167
Abstract
A convection based multi-axis tilt sensor using air medium has many advantages, such as small size, simple structure, low cost, reliability and durability. In this paper, a study focused on optimizing two different parameters, the geometry of temperature sensors and air volume of encapsulated micro-chamber filled with air medium, is mainly reported.
Keywords
microsensors; temperature sensors; MEMS-based tilt sensor; air medium; encapsulated microchamber; multiaxis tilt sensor; temperature sensor geometry; Costs; Etching; Fabrication; Nickel; Packaging; Sensor phenomena and characterization; Temperature distribution; Temperature sensors; Thermal sensors; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2009 IEEE
Conference_Location
Christchurch
ISSN
1930-0395
Print_ISBN
978-1-4244-4548-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2009.5398205
Filename
5398205
Link To Document