Title :
Fabrication of temperature and carbon monoxide micro-sensors in a micro-reformer
Author :
Lee, Chi-Yuan ; Chang, Yu-Ming ; Chang, Chi-Chung
Author_Institution :
Dept. of Mech. Eng., Yuan Ze Univ., Taoyuan, Taiwan
Abstract :
The several challenges associated with micro-reformers that have not yet been resolved include reducing their size, reducing the quantity of carbon monoxide (CO) they emit, and their integration in fuel cells. In this work, temperature and CO micro-sensors are applied in a micro-reformer to measure temperature and CO concentration. Micro-electro-mechanical systems (MEMS) are fabricated with temperature and CO micro-sensors on stainless-steel foil. The temperature and CO micro-sensors are placed in different positions inside the micro-reformer. The major advantages of the temperature and CO micro-sensors are their high accuracy and sensitivity and their ability to measure temperature and the CO concentration inside a micro-reformer.
Keywords :
carbon compounds; fuel cells; microfabrication; microsensors; sensitivity; temperature measurement; CO; fuel cell; microelectro-mechanical system; microreformer; microsensors; sensitivity; stainless-steel foil; temperature fabrication; temperature measurement; Calibration; Fuel cells; Gas detectors; Resistance; Temperature measurement; Temperature sensors; CO micro-sensor; MEMS; micro-reformer; temperature micro-sensor;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017317