DocumentCode
3280783
Title
ZnO/sapphire based layered surface acoustic wave devices for microfluidic applications
Author
Tjeung, Ricky T. ; Maurya, Devendra K. ; Yeo, Leslie Y. ; Friend, James R. ; Kandasamy, Sasikaran
Author_Institution
Micro/Nanophysics Res. Lab., Monash Univ., Clayton, VIC, Australia
fYear
2011
fDate
20-23 Feb. 2011
Firstpage
205
Lastpage
208
Abstract
The microfluidic applications of a ZnO/Sapphire based layered surface acoustic wave structure are being investigated. Properties of the ZnO/Sapphire layered SAW device including surface wave velocity and propagation loss were measured and correlated to the fluidic behavior of micro droplets. Acoustic streaming was observed in the form of two vortices. Micro particles were also observed to concentrate in the vortices within 4 seconds of device activations.
Keywords
drops; microfluidics; sapphire; surface acoustic wave devices; vortices; zinc compounds; ZnO-Al2O3; ZnO/sapphire based layered surface acoustic wave devices; acoustic streaming; microdroplets; microfluidic application; microparticles; propagation loss; surface wave velocity; vortices; Microfluidics; Substrates; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location
Kaohsiung
Print_ISBN
978-1-61284-775-7
Type
conf
DOI
10.1109/NEMS.2011.6017330
Filename
6017330
Link To Document