• DocumentCode
    3280783
  • Title

    ZnO/sapphire based layered surface acoustic wave devices for microfluidic applications

  • Author

    Tjeung, Ricky T. ; Maurya, Devendra K. ; Yeo, Leslie Y. ; Friend, James R. ; Kandasamy, Sasikaran

  • Author_Institution
    Micro/Nanophysics Res. Lab., Monash Univ., Clayton, VIC, Australia
  • fYear
    2011
  • fDate
    20-23 Feb. 2011
  • Firstpage
    205
  • Lastpage
    208
  • Abstract
    The microfluidic applications of a ZnO/Sapphire based layered surface acoustic wave structure are being investigated. Properties of the ZnO/Sapphire layered SAW device including surface wave velocity and propagation loss were measured and correlated to the fluidic behavior of micro droplets. Acoustic streaming was observed in the form of two vortices. Micro particles were also observed to concentrate in the vortices within 4 seconds of device activations.
  • Keywords
    drops; microfluidics; sapphire; surface acoustic wave devices; vortices; zinc compounds; ZnO-Al2O3; ZnO/sapphire based layered surface acoustic wave devices; acoustic streaming; microdroplets; microfluidic application; microparticles; propagation loss; surface wave velocity; vortices; Microfluidics; Substrates; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
  • Conference_Location
    Kaohsiung
  • Print_ISBN
    978-1-61284-775-7
  • Type

    conf

  • DOI
    10.1109/NEMS.2011.6017330
  • Filename
    6017330