Title :
ZnO/sapphire based layered surface acoustic wave devices for microfluidic applications
Author :
Tjeung, Ricky T. ; Maurya, Devendra K. ; Yeo, Leslie Y. ; Friend, James R. ; Kandasamy, Sasikaran
Author_Institution :
Micro/Nanophysics Res. Lab., Monash Univ., Clayton, VIC, Australia
Abstract :
The microfluidic applications of a ZnO/Sapphire based layered surface acoustic wave structure are being investigated. Properties of the ZnO/Sapphire layered SAW device including surface wave velocity and propagation loss were measured and correlated to the fluidic behavior of micro droplets. Acoustic streaming was observed in the form of two vortices. Micro particles were also observed to concentrate in the vortices within 4 seconds of device activations.
Keywords :
drops; microfluidics; sapphire; surface acoustic wave devices; vortices; zinc compounds; ZnO-Al2O3; ZnO/sapphire based layered surface acoustic wave devices; acoustic streaming; microdroplets; microfluidic application; microparticles; propagation loss; surface wave velocity; vortices; Microfluidics; Substrates; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017330
