Design and fabrication of a Piezoelectric Micro Synthetic Jet Actuator

Synthetic Jet Actuator (SJA) is a new type actuator for active flow control applications. A Piezoelectric Micro SJA based on MEMS technology was present in this work. The simulation of device performance was carried out through a multi-domain coupled analysis model, and the relative error of jet velocity between simulation results and experiment data is less than 8%. A batch fabrication process was proposed to integrated fabrication of piezoelectric film and silicon structure. And using this process, prototype of micro SJA was gained. Preliminary tests of SJA´s performance show that the max synthetic jet velocity (8.2m/s) is obtained as driving voltage is 25V and driving frequency close to the first-order natural frequency (10500Hz).