Design and fabrication of long focal length microlens arrays

Author

Vinna ; Hsieh, Hsin-Ta ; Hsieh, Jo-Lan ; Su, Guo-Dung John

Author_Institution

Grad. Inst. of Photonics & Optoelectron., Nat. Taiwan Univ., Taipei, Taiwan

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

317

Lastpage

320

Abstract

We present microlens array (MLA) with various structure and arrangement in long focal length (millimeter range) based on thermal reflow process. The microlens focal length is usually in the same order of lens diameter or several hundred microns. To extend the focal length, we made a photoresist MLA covered by Polydimethysiloxane (PDMS) film on a glass substrate. Because the refractive index difference between PDMS and MLA interface is lower than that of air and MLA interface, the light is less bended when passing through it and focuses in a far distance. The experimental result shows 235 μm diameter and 135 μm diameter MLA with 5.27 mm focal length and 1.81 mm focal length, which is around 6 times longer than the conventional thermal reflow method. Besides, other specific focal lengths could be realized by modifying the refractive index difference.

Keywords

focal planes; glass; microfabrication; microlenses; photoresists; refractive index; substrates; glass substrate; long focal length microlens arrays; photoresist MLA; polydimethysiloxane film; refractive index; size 1.81 mm; size 135 mum; size 235 mum; size 5.27 mm; thermal reflow process; Coatings; Glass; Image sensors; Lenses; Microoptics; Refractive index;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017357

Filename

6017357