Design and demonstration of micro multi-step mirrors and light source in micro FTIR

Author

Liang, Zhongzhu ; Fu, Jianguo ; Feng, Cong ; Liang, Jingqiu

Author_Institution

State Key Lab. of Appl. Opt., CAS, Changchun, China

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

433

Lastpage

436

Abstract

To obtain high resolution, high signal-to-noise ratio (SNR), high reliability and real time in wide spectral range, we study the space modulation Micro Fourier Transform Spectrometer (μFTS) based on multi-step mirrors covering the spectral range of 3-5μm and 8-12 μm in theory and experiment. The influences of spectrum reconstruction caused by the diffraction and extended light source in Fourier Transform Infrared Spectrometer (FTIR) are analyzed. A method to reduce the noises in spectrum reconstruction and the relationship between coherent intensity and solid angle of light source are discussed. An extended light source with suitable size is chosen, considering the requirement of SNR and spectrum resolving power in the optical design. Furthermore, the fabrication of micro multi-step mirrors, which is the core part of μFTS, is investigated. Three methods for fabricating multi-step micro mirrors are demonstrated.

Keywords

Fourier transform spectrometers; infrared spectrometers; light sources; microfabrication; micromirrors; SNR; extended light source; microFTIR; micromultistep mirror demonstration; micromultistep mirror design; micromultistep mirror fabrication; noise reduction method; optical design; reliability; signal-to-noise ratio; size 3 mum to 5 mum; size 8 mum to 12 mum; space modulation microFourier transform spectrometer; spectrum reconstruction; spectrum resolving power; Diffraction; Films; Light sources; Mirrors; Signal to noise ratio; Silicon; FTIR; diffraction; light source; mirror; spectrometers;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017385

Filename

6017385