Title :
A simple systematic procedure of Si-based spiral inductor design
Author :
Lee, Chih-Yuan ; Chen, Tung-Sheng ; Kao, Chin-Hsing ; Deng, Joseph Der-Sheng ; Yen, Chuan-Chang ; Lee, Yu-Kuo ; Kuo, Jung-Ching ; Chang, Jui-Fu ; Huang, Guo-Wei ; Chen, Kun-Ming ; Duh, Ting-Shien
Author_Institution :
Semicond. Lab., Chung Cheng Inst. of Technol., Taoyuan, Taiwan
Abstract :
In this paper, a systematic design procedure, based on Q-curve analysis, and the corresponding high-Q inductor design guidelines have been proposed. Based on the presented guidelines, a phenomenal Q-value increment as high as 122% in 4 nH spiral inductors has been realized by a technique which combines an optimized poly shielding layer and proton implantation treatment. The technique is a promising solution to put inductors on silicon substrates with satisfactory performance for Si-based RFIC applications.
Keywords :
Q-factor; equivalent circuits; inductors; ion implantation; optimisation; radiofrequency integrated circuits; Q-curve analysis; RFIC; Si; high-Q inductor; optimized poly shielding layer; parallel equivalent circuit model; proton implantation treatment; spiral inductor design; Guidelines; Implants; Inductance; Inductors; Protons; Q factor; Radio frequency; Radiofrequency integrated circuits; Silicon; Spirals;
Conference_Titel :
Radio Frequency Integrated Circuits (RFIC) Symposium, 2004. Digest of Papers. 2004 IEEE
Print_ISBN :
0-7803-8333-8
DOI :
10.1109/RFIC.2004.1320697
