Effective photoluminescence in a large-area array of Ta2O5 nanodots (PL of Ta2O5 nanodots)

Author

Devan, Rupesh S. ; Lin, Ching-Ling ; Lin, Jin-Han ; Patil, Ranjit R. ; Ma, Yuan-Ron

Author_Institution

Dept. of Phys., Nat. Dong Hwa Univ., Hualien, Taiwan

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

462

Lastpage

465

Abstract

In this study we present the synthesis of the large-area Ta₂O₅ nanodot array by utilizing hot filament metal vapor deposition technique. The Ta₂O₅ nanodots were arranged in a large-area array on a Si wafer, and their average diameter is ~35 nm. X-ray photoemission spectroscopy (XPS) revealed the stoichiometric Ta and O compositions of Ta₂O₅ nanodots. Raman spectroscopy showed the Ta₂O₅ nanodots to be of orthorhombic (β) crystal. Photoluminescence (PL) spectroscopy displayed that the β-Ta₂O₅ nanodots provided green and red light emissions at room temperature.

Keywords

Raman spectra; X-ray photoelectron spectra; nanofabrication; nanostructured materials; photoluminescence; stoichiometry; tantalum compounds; Raman spectroscopy; Si; Ta₂O₅; X-ray photoemission spectroscopy; XPS; effective photoluminescence spectroscopy; hot filament metal vapor deposition technique; large-area nanodot array; orthorhombic crystal; red light emissions; stoichiometry; temperature 293 K to 298 K; Arrays; Electron traps; Optical films; Optical variables control; Silicon; Spectroscopy; Raman scattering; Ta2O5; X-ray photoemission; hot filament metal vapor deposition; nanodot; photoluminescence (PL); spectroscopy (XPS); trap-level;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017393

Filename

6017393