Stepwise improvement of room temperature VOC sensing layers by addition of catalysts on micro- and nanoscale

Polycrystalline Ga₂O₃/platinum-thick films can be used as a novel sensing layer for VOC detection in sensors based on the readout of the work function by GasFET devices. Room temperature operation can be used if an intermittent short thermal activation at 175°C is employed. This paper reports on how the stepwise addition of catalytic activity using platinum as catalyst incrementally improves the gas sensitivity of this material system towards VOCs. The best variants are capable to detect small concentrations even below the odor or medical exposure threshold.