Title :
Fabrication of a multi-modal sensor with PH, EC and temperature sensing areas for agriculture application
Author :
Futagawa, Masato ; Takao, Hidekuni ; Ishida, Makoto ; Sawada, Kazuaki ; Iwasaki, Takuya
Author_Institution :
Dept. of Electron. & Inf. Eng., Toyohashi Univ. of Technol., Toyohashi, Japan
Abstract :
A multi-modal sensor, with which was possible to simultaneously measure pH, electrical conductivity (EC) and temperature, was fabricated. The pH sensor, EC sensor, and temperature sensor were integrated using compatible complementary metal-oxide semiconductor (CMOS) logic technology on a small Si chip (area, 25 mm2). Simultaneous measurements of pH, EC and temperature were demonstrated, and the sensor was used successfully to measure three different kinds of signal from the sensors with a pH 4.01 buffering solution. In another measurement, the sensor was possible to be inserted in soil, and used to successfully measure EC in real time for 6 days.
Keywords :
CMOS logic circuits; agriculture; chemical sensors; electric sensing devices; electrical conductivity measurement; microsensors; pH measurement; temperature measurement; temperature sensors; CMOS logic; agriculture; complementary metal-oxide semiconductor logic technology; electrical conductivity sensor; multimodal sensor chip; pH sensor; temperature sensor; Agriculture; CMOS technology; Conductivity measurement; Electric variables measurement; Fabrication; MOS devices; Multimodal sensors; Semiconductor device measurement; Soil measurements; Temperature sensors;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398294
