Title :
Ultrasensitive MEMS-based inertial system
Author :
Novak, Lukas ; Neuzil, Pavel ; Li, Jing ; Woo, Matthew
Author_Institution :
Czech Tech. Univ. in Prague, Prague, Czech Republic
Abstract :
In this paper we present the design and fabrication of sensitive capacitive MEMS-based accelerometer and its high signal-to-noise ratio read-out electronic circuit. The combination of sensitive accelerometer and sensitive read-out electronics resulted in the system sensitivity of 135 V/G with the detection limit of 22 ¿G acceleration or 0.05 degree inclination.
Keywords :
accelerometers; capacitive sensors; microsensors; readout electronics; design; fabrication; read-out electronic circuit; sensitive capacitive MEMS-based accelerometer; ultrasensitive MEMS-based inertial system; Acceleration; Accelerometers; Boron; Capacitors; Differential amplifiers; Fabrication; Operational amplifiers; Signal to noise ratio; Silicon on insulator technology; Springs;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398301
