Title :
Novel Reconfigurable Semiconductor Photonic Bandgap-MEMS Device
Author :
Zhou, Weimin ; Mackie, David ; Taysing-Lara, Monica ; Dang, Gerard ; Newman, Peter G.
Keywords :
Biomembranes; Etching; Gallium arsenide; Micromechanical devices; Optical waveguides; Photonic band gap; Photonic crystals; Photonic integrated circuits; Structural panels; Waveguide transitions;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1595971