DocumentCode
3282783
Title
Liquid damping isolation on quartz crystal microbalance for effective preservation of high quality factor and sensitivity in liquid
Author
Kirkendall, Christopher R. ; Kwon, Jae W.
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Missouri-Columbia, Columbia, MO, USA
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
607
Lastpage
610
Abstract
This paper reports a novel design of a quartz crystal microbalance (QCM) for effective preservation of high quality factor and sensitivity in liquid. Many previous attempts have not achieved effective solutions to improve the QCM´s performance in liquid. It is challenging to create a device without serious liquid damping effect. Our new design removes this dependence through an acoustic loss isolation layer (vacuum) and a sensing diaphragm, which reduce direct contact area at the interface between the QCM and liquid. The sensing diaphragm plays another important role of keeping the liquid damping effect at a much lower frequency than the operating frequency of the QCM. By successful isolation of the liquid damping effect from the QCM´s resonance, we have successfully been able to preserve high Q in liquid. Q of 1603 in air and 1600 in water (less than 1% reduction) have been clearly observed.
Keywords
Q-factor; acoustic waves; crystal resonators; damping; diaphragms; liquids; microbalances; QCM; acoustic loss isolation layer; liquid damping isolation; quality factor; quartz crystal microbalance; sensing diaphragm; sensitivity; Acoustic devices; Acoustic signal detection; Acoustic transducers; Acoustic waves; Capacitance; Damping; Q factor; Resonance; Resonant frequency; Surface acoustic wave devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2009 IEEE
Conference_Location
Christchurch
ISSN
1930-0395
Print_ISBN
978-1-4244-4548-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2009.5398319
Filename
5398319
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