Digital closed-loop controller design of a micromachined gyroscope based on auto frequency swept

Author

Lin, Longtao ; Liu, Dachuan ; Cui, Jian ; Guo, Zhongyang ; Yang, Zhenchuan ; Yan, Guizhen

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

654

Lastpage

657

Abstract

This paper describes the design of a digital signal processing system for a MEMS vibratory gyroscope. It focuses on automatically obtaining the parameters of the gyroscope and ensure it vibrate at the resonance frequency through auto frequency swept. A closed-loop control method based on phase locked loop (PLL) and the automatic gain control (AGC) with a proportion-integral (PI) controller. The angular rate demodulation is realized by adaptive filter algorithm. The whole closed-loop system is implemented on a field-programmed-gate-array (FPGA) platform with a Z-axis tuning fork gyroscope. The sensitivity is 3.7mv/deg/s with non-linearity 0.075% and the bias stability is 0.02°/s (1σ).

Keywords

PI control; adaptive filters; automatic gain control; closed loop systems; control system synthesis; digital control; field programmable gate arrays; gyroscopes; microsensors; phase locked loops; vibrations; AGC; FPGA platform; MEMS vibratory gyroscope; PI controller; PLL; Z-axis tuning fork gyroscope; adaptive filter algorithm; angular rate demodulation; autofrequency swept; automatic gain control; digital closed-loop controller design; digital signal processing system; field-programmed-gate-array platform; micromachined gyroscope; phase locked loop; proportion-integral controller; Demodulation; Field programmable gate arrays; Force; Gyroscopes; Micromechanical devices; Resonant frequency; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017440

Filename

6017440