Title :
Structural and Analytical Studies of 4H Silicon Carbide MOSFETs with Thermally Grown Oxides
Author :
Zheleva, Tsvetanka ; Levin, Igor ; Habersat, Dan ; Lelis, Aivars ; Dautrich, Morgen ; Lenahan, Patrick
Keywords :
Chemicals; Electrons; Laboratories; MOSFETs; Materials science and technology; Milling machines; NIST; Powders; Silicon carbide; Spectroscopy;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1596019
