Title :
A new integrated temperature and humidity
Author :
Fang, Zhen ; Zhao, Zhan ; Zhang, Jiangang ; Du, Lidong ; Xu, Jing ; Geng, Daoqu ; Shi, Yaohong
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Beijing, China
Abstract :
MEMS-based integrated temperature and humidity sensor has the advantages of low weight, small size, low cost, easy integrity and is a highly advanced apparatus of identity, reliability, easy production. The feasibility of thermal conductivity method used to measure humidity and structure of the integrated temperature and humidity sensor are analyzed in this paper, and provides the measuring methods in detail. We mainly focus on measuring result of the humidity part, and verify the excellent performance of the integrated temperature and humidity sensor, then introducing a function W(h)=V22-k*V12, here k is a constant expressed by k=R2/R1, and W(h) becomes a simple monotonic curve independent of the ambient temperature. Based on designed integrated sensor, the portable measurement device have been designed and tested in field.
Keywords :
humidity sensors; microsensors; temperature sensors; thermal conductivity measurement; MEMS; ambient temperature; integrated sensor; integrated temperature-humidity sensor; monotonic curve; thermal conductivity method; Conductivity; Humidity; Humidity measurement; Pollution measurement; Resistance; Temperature measurement; Temperature sensors; integrated temperature and humidity sensor; micro-air-bridge; thermal conductivity;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017472
