Design and fabrication of a hollow micro-disk mass sensor

Author

Zhao, L. ; Jiao, J. ; Zhang, Y. ; Mi, B. ; Gu, J. ; Zhou, P. ; Zhang, X.

Author_Institution

State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China

fYear

2009

fDate

25-28 Oct. 2009

Firstpage

1187

Lastpage

1190

Abstract

In this paper, a novel hollow micro-disk mass sensor based on mode generation and degeneration principle is presented, which has the advantages of self-compensating environmental fluctuation and eliminating viscous damping as vacuum packaged. The device configuration, including the width of support beams, the channel height and the allocation of the sensing piezoresistors are carefully analyzed and then designed to achieve better sensitivity. Using a double sacrificial layer process along with DRIE, the sensor was successfully fabricated and the preliminary test has been accomplished.

Keywords

discs (structures); mass measurement; micromechanical resonators; microsensors; piezoresistive devices; channel height; device configuration; double sacrificial layer; hollow microdisk mass sensor; mode degeneration principle; mode generation principle; self-compensating environmental fluctuation; sensing piezoresistors; sensitivity; support beams; viscous damping; Biosensors; Chemical and biological sensors; Damping; Electrodes; Fabrication; Fluctuations; Optical resonators; Optical sensors; Resonance; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2009 IEEE

Conference_Location

Christchurch

ISSN

1930-0395

Print_ISBN

978-1-4244-4548-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2009.5398356

Filename

5398356