Title :
Silicon Nanowire Field Effect Transistor Test Structures Fabricated by Top-down Approaches
Author :
Koo, Sang-Mo ; Li, Qiliang ; Edelstein, Monica D. ; Richter, Curt A. ; Vogel, Eric M.
Keywords :
CMOS logic circuits; Doping; Electronic equipment testing; FETs; Fabrication; Logic devices; Nanoscale devices; Schottky barriers; Semiconductor device testing; Silicon;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1596037
