• DocumentCode
    3283775
  • Title

    Development of High frequency Love Mode Surface Acoustic Wave ZnO/SiO2/Si Devices

  • Author

    Krishnamoorthy, S. ; Iliadis, A.A.

  • fYear
    2005
  • fDate
    Dec. 7-9, 2005
  • Firstpage
    189
  • Lastpage
    190
  • Keywords
    Acoustic propagation; Acoustic waves; Annealing; Capacitive sensors; Fingers; Frequency; Pulsed laser deposition; Substrates; Surface acoustic wave devices; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2005 International
  • Print_ISBN
    1-4244-0083-X
  • Type

    conf

  • DOI
    10.1109/ISDRS.2005.1596046
  • Filename
    1596046
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3283775