DocumentCode :
3284005
Title :
Magnetic Properties of Atomic-Layer-Deposited Hafnium Dioxide
Author :
Chen, H.-Y. ; Ye, P.D. ; Murray, J. ; Xiong, P. ; von Molnar, S. ; Wilk, G.D.
fYear :
2005
fDate :
Dec. 7-9, 2005
Firstpage :
217
Lastpage :
218
Keywords :
Crystallization; Hafnium oxide; Magnetic field measurement; Magnetic films; Magnetic materials; Magnetic properties; Magnetosphere; Rapid thermal annealing; Temperature dependence; Temperature measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
Type :
conf
DOI :
10.1109/ISDRS.2005.1596060
Filename :
1596060
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3284005
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