Title :
Ge/Cu/Ti Ohmic contacts to n-type GaN
Author :
Mahadik, Nadeemullah ; Rao, Mulpuri V. ; Davydov, Albert V.
Keywords :
Annealing; Electric resistance; Gallium nitride; Materials science and technology; Metallization; Ohmic contacts; Oxidation; Temperature; Thermal resistance; Tin;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1596064