DocumentCode
3284225
Title
PMMA high sensitive capacitive micro accelerometer fabricated based on hot embossing
Author
Amaya, Satoshi ; Dao, Dzung Viet ; Sugiyama, Susumu
Author_Institution
TOWA Corp., Kyoto, Japan
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
1301
Lastpage
1304
Abstract
This paper presents for the first time the fabrication and testing of a PMMA capacitive micro accelerometer based on hot embossing and ultra-precision machining. The detection principle of the PMMA micro accelerometer is based on closing-gap capacitive combs. Since the sensor is made of PMMA polymer, it would be very flexible, high sensitive and low cost. The PMMA micro accelerometer was tested and very high sensitivity of 0.4 pF /G or equivalent to 0.16 V/G/V was obtained.
Keywords
accelerometers; capacitive sensors; embossing; micromachining; microsensors; polymers; PMMA; closing-gap capacitive combs; high precision machining; high sensitive capacitive microaccelerometer; hot embossing; polymer; ultra-precision machining; Accelerometers; Bonding; Costs; Electrodes; Embossing; Fabrication; Fingers; Micromechanical devices; Polymers; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2009 IEEE
Conference_Location
Christchurch
ISSN
1930-0395
Print_ISBN
978-1-4244-4548-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2009.5398397
Filename
5398397
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