Title :
Characteristics of RuO2 bottom electrode for MIM capacitor
Author :
Do, Seung Woo ; Jang, Cheol Yeong ; Lee, Dae Gab ; Choi, Sung Hwan ; Lee, Yong Hyun
Keywords :
Annealing; Argon; Conductivity; Electrodes; MIM capacitors; Magnetic analysis; Radio frequency; Solids; Sputtering; Temperature;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1596091
