Title :
Blind AFM tip estimation by using porous anodic alumina membrane
Author :
Han, Guoqiang ; Chen, Shu ; Zhang, Dong
Author_Institution :
Sch. of Mech. Eng. & Autom., Fuzhou Univ., Fuzhou, China
Abstract :
AFM images are distorted representations of sample surfaces due to the dilation produced by the AFM tip shape in micro/nano-scale profile measurement. It is necessary to obtain the tip shape information in order to correct such distortion in micro/nano metrology. Ordered nano porous alumina templates have attracted increasing attention in recent years due to their possible utilization as templates for the organization of nanosize structures or others. Porous anodic alumina membrane is used as an AFM tip characterizer to estimate the AFM tip shape and scanning direction-based characterization method is used to estimate the AFM tip shape.
Keywords :
alumina; atomic force microscopy; measurement; membranes; micrometry; nanoporous materials; surface structure; Al2O3; blind AFM image; dilation; micronano metrology; micronano-scale profile measurement; ordered nanoporous alumina templates; porous anodic alumina membrane; scanning direction-based characterization method; surface distortion; tip shape information; Educational institutions; Estimation; Metrology; Scanning electron microscopy; Shape; Surface morphology; AFM Tip; Atomic Force Microscopy; Blind Tip Estimation; Porous Anodic Alumina Membrane;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017539
