A wide-bandwidth, wide dynamic-range thermal ΣΔ architecture for convective accelerometers

Author

Leman, O. ; Mailly, F. ; Latorre, L. ; Nouet, P.

Author_Institution

LIRMM, Univ. Montpellier 2, Montpellier, France

fYear

2009

fDate

25-28 Oct. 2009

Firstpage

1828

Lastpage

1831

Abstract

This work describes the implementation and the modeling of a convective accelerometer with 1^st-order thermal ΣΔ readout. This closed-loop system is obtained by the hybrid combination of a CMOS sensor prototype which includes an amplifier, and discrete electronic devices. A high comparator precision is reached by dynamic offset cancellation of the amplifier. After a modeling of the Johnson noise and of the quantization-noise, the parameters of the modulator are optimized to get a good linearity, an improved gain precision and a wide dynamic range.

Keywords

CMOS integrated circuits; accelerometers; amplifiers; closed loop systems; comparators (circuits); detector circuits; microsensors; sigma-delta modulation; thermal noise; 1^st-order thermal ΣΔ readout; CMOS sensor; Johnson noise; amplifier; closed-loop system; comparator; convective accelerometers; discrete electronic devices; dynamic offset cancellation; linearity; precision; quantization noise; wide dynamic-range thermal ΣΔ architecture; Acceleration; Accelerometers; Bandwidth; Bridge circuits; Bridges; Detectors; Probes; Prototypes; Sensor phenomena and characterization; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2009 IEEE

Conference_Location

Christchurch

ISSN

1930-0395

Print_ISBN

978-1-4244-4548-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2009.5398429

Filename

5398429