Title :
Digital control of tunneling accelerometer
Author :
Burgner, Chris ; Yie, Zi ; Kataria, Nitin ; Oropeza, Laura ; Ström, Karl A. ; Brewer, Forrest ; Turner, Kimberly
Author_Institution :
Mech. Eng., Univ. of California at Santa Barbara, Santa Barbara, CA, USA
Abstract :
A controller for a tunneling accelerometer has two tasks: to establish tunneling and to maintain tunneling during acceleration. This paper describes the design and implementation of a digital controller that accomplishes these tasks and provides the appropriate gain switching. The control law is based on a standard configuration of an observer and state feedback. A digital controller is implemented because the controller parameters can be easily adjusted, thereby allowing for rapid prototyping. The design methodology presented here can be used as a general plug-and-play controller platform for a range of MEMS sensors. The performance of the digital controller is illustrated experimentally using metrics such as tracking response, drift, noise floor and response linearity.
Keywords :
accelerometers; control system synthesis; digital control; microsensors; state feedback; MEMS sensors; digital control; gain switching; plug-and-play controller platform; rapid prototyping; response linearity; state feedback; tracking response; tunneling accelerometer controller; Acceleration; Accelerometers; Digital control; Electrodes; Force feedback; Gold; Iron; Springs; Tunneling; Voltage;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398432