The research of a novel gyroscope based on high Q micro-resonator

Optical microcavities confine light to small model volumes and have ultrahigh quality factor (Q), especially microtoroid cavities, having very broad application prospects. In this paper, a micro-optical-electro-mechanical system (MOEMS) gyroscope was developed taking a new optical microcavity-planar microdisk cavity as the core sensing element. To obtain resonance curve, a resonant cavity proof-of-principle experiment was performed. As the light source and planar microdisk cavity dimensions have a decisive influence on the Q value of microcavity and angular rate measurement limit of gyroscope, a method was discussed that using traditional F-P cavity resonance curve for optimization of planar microdisk cavity geometric parameters.