Title :
Accurate design of inductors on multi-chip module using high-resistivity silicon substrate
Author :
Jenshan Lin ; Zu, L. ; Frye, R.C. ; Tai, K.L. ; Kossives, D. ; Young-Kai Chen
Author_Institution :
Lucent Technol., AT&T Bell Labs., Murray Hill, NJ
Abstract :
We report an efficient and practical method for accurate design of inductors on Multi-Chip Module (MCM) silicon substrate. The substrate loss was measured and implemented into the model. Both measured inductance and quality factor agree well with simulation. Optimal design of inductors within a finite area is also discussed
Keywords :
Q-factor; inductors; losses; multichip modules; MCM; Si; high-resistivity Si substrate; inductor design; multi-chip module; quality factor; substrate loss;
Conference_Titel :
Electrical Performance of Electronic Packaging, 1996., IEEE 5th Topical Meeting
Conference_Location :
Napa, CA
Print_ISBN :
0-7803-3514-7
DOI :
10.1109/EPEP.1996.564826
