Title :
Modeling of MOSFET Gate leakage for High k Gate Dielectrics
Author :
Wu, Huixian ; Zhao, Yijie ; White, Marvin H.
Keywords :
Drives; Equations; Gate leakage; High K dielectric materials; High-K gate dielectrics; MOSFET circuits; Quantum mechanics; Semiconductor device modeling; Surface waves; Tunneling;
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
DOI :
10.1109/ISDRS.2005.1596145