DocumentCode
3285394
Title
Estimation of the lateral component of the electrostatic force in MEMS
Author
Dragunov, V.P. ; Seleznev, A.N. ; Kholavko, V.N.
Volume
01
fYear
2008
fDate
23-25 Sept. 2008
Firstpage
181
Lastpage
181
Abstract
The experimental results and theoretical considerations concerning the lateral component of electrostatic force in MEMS are presented.
Keywords
electrostatics; micromechanical devices; MEMS; electrostatic force; lateral component estimation; Biosensors; Capacitive sensors; Crystals; Electrostatic measurements; Lithium; Micromechanical devices; Nanobioscience; Piezoresistive devices; Temperature; Water;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering, 2008. APEIE 2008. 9th International Conference on Actual Problems of
Conference_Location
Novosibirsk
Print_ISBN
978-1-4244-2825-0
Type
conf
DOI
10.1109/APEIE.2008.4897084
Filename
4897084
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