• DocumentCode
    3285481
  • Title

    Determination of Evolution Path for BmIn Clusters in Atomistic Model

  • Author

    Yoo, Jae-Hyun ; Hwang, Chi-Ok ; Yoon, Kwan-Sun ; Kim, Jung-Sik ; Won, Taeyoung

  • fYear
    2005
  • fDate
    Dec. 7-9, 2005
  • Firstpage
    406
  • Lastpage
    407
  • Keywords
    Bismuth; Boron; Diffusion processes; Electronic mail; Ion implantation; Kinetic theory; Monte Carlo methods; Simulated annealing; Tail;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2005 International
  • Print_ISBN
    1-4244-0083-X
  • Type

    conf

  • DOI
    10.1109/ISDRS.2005.1596158
  • Filename
    1596158
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3285481