Title :
Temperature measurement through protective glass
Author :
Babikov, A.A. ; Zakharenko, V.A.
Abstract :
Experimental results and theoretical considerations concerning contactless measurement of temperature through the protective glass of the reactor in the production of technical carbon are presented.
Keywords :
glass; temperature measurement; protective glass; technical carbon; temperature measurement; Etching; Glass; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma measurements; Plasma temperature; Protection; Silicon; Temperature measurement;
Conference_Titel :
Electronic Instrument Engineering, 2008. APEIE 2008. 9th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-2825-0
DOI :
10.1109/APEIE.2008.4897089
