DocumentCode
3285625
Title
9th International Vacuum Microelectronics Conference
fYear
1996
fDate
7-12 July 1996
Abstract
The following topics were dealt with: vacuum microelectronics devices; theory, simulation and modeling; field emission and emission physics; new materials; electron sources (e.g. diamond, polarized, ballistic); fabrication, micromachining, and processing; field ion sources for nanotechnology; field emitter arrays and multi-electrode structures; field emitter display, RF, and other applications
Keywords
vacuum microelectronics; RF applications; electron sources; fabrication; field emission; field emitter arrays; field emitter displays; field ion sources; micromachining; multi-electrode structures; nanotechnology; vacuum microelectronics;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location
St. Petersburg, Russia
Print_ISBN
0-7803-3594-5
Type
conf
DOI
10.1109/IVMC.1996.601760
Filename
601760
Link To Document