DocumentCode :
3285625
Title :
9th International Vacuum Microelectronics Conference
fYear :
1996
fDate :
7-12 July 1996
Abstract :
The following topics were dealt with: vacuum microelectronics devices; theory, simulation and modeling; field emission and emission physics; new materials; electron sources (e.g. diamond, polarized, ballistic); fabrication, micromachining, and processing; field ion sources for nanotechnology; field emitter arrays and multi-electrode structures; field emitter display, RF, and other applications
Keywords :
vacuum microelectronics; RF applications; electron sources; fabrication; field emission; field emitter arrays; field emitter displays; field ion sources; micromachining; multi-electrode structures; nanotechnology; vacuum microelectronics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg, Russia
Print_ISBN :
0-7803-3594-5
Type :
conf
DOI :
10.1109/IVMC.1996.601760
Filename :
601760
Link To Document :
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