Measurement of displacement parameters of UHF devices elements by interference method using neural network technologies for information processing

To obtain accurate displacement data for the objects with non-flat surface by UHF interference method using 3 probes the neural network technologies were used. The real experiments were made. To provide quadratic characteristic of the detectors the calibration using the developed mathematical model of neural network was performed. Combining UHF interference method with neural network technologies increased accuracy of displacement parameters measurement.