• DocumentCode
    3285773
  • Title

    Influence of SOI-generated stress on BiCMOS performance

  • Author

    Johansson, Ted ; Malm, B. Gunnar ; Norström, Hans ; Smith, Ulf ; Östling, Mikael

  • fYear
    2005
  • fDate
    Dec. 7-9, 2005
  • Firstpage
    444
  • Lastpage
    445
  • Keywords
    BiCMOS integrated circuits; Capacitance; Capacitive sensors; Compressive stress; Diffusion tensor imaging; Etching; Information technology; Laboratories; Materials science and technology; Microelectronics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2005 International
  • Print_ISBN
    1-4244-0083-X
  • Type

    conf

  • DOI
    10.1109/ISDRS.2005.1596177
  • Filename
    1596177
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3285773