Laser microstructuring of congruent lithium niobate by UV ps-pulses

Author

Stolze, Mareike ; Herrmann, Thomas ; Weigand, Benjamin ; L´huillier, Johannes

Author_Institution

Photonik-Zentrum Kaiserslautern e.V., Kaiserslautern, Germany

fYear

2012

fDate

9-13 July 2012

Firstpage

1

Lastpage

4

Abstract

We present single shot experiments at different pulse energies for LiNbO₃ on c⁺-side and c^--side by using a laser wavelength of 355 nm and a pulse duration of about 10 ps. Furthermore, we demonstrate laser micromachined grooves with high spatial pulse overlap on the c⁺-side of LiNbO₃. Here a (rms) sidewall roughness as low as 20 nm has been achieved at an ablation depth of 1.2μm.

Keywords

ferroelectric materials; laser ablation; laser beam machining; lithium compounds; micromachining; surface roughness; LiNbO₃; UV ps-pulses; congruent lithium niobate; depth 1.2 mum; ferroelectric materials; laser ablated surfaces; laser micromachined grooves; laser microstructuring; single shot experiments; wavelength 355 nm; Laser ablation; Laser theory; Lithium niobate; Materials; Optical waveguides; Surface emitting lasers; Waveguide lasers; Picosecond laser ablation; crystal orientation; ridge waveguide; surface roughness;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp

Conference_Location

Aveiro

Print_ISBN

978-1-4673-2668-1

Type

conf

DOI

10.1109/ISAF.2012.6297765

Filename

6297765