• DocumentCode
    3286031
  • Title

    Development of suspended gate field effect transistors array-based microsystem for pH measurements

  • Author

    Rodrigues, B. Da Silva ; De Sagazan, O. ; Crand, S. ; Le Bihan, F. ; Mohammed-Brahim, T. ; Morimoto, N.

  • Author_Institution
    Univ. de Rennes 1, Rennes, France
  • fYear
    2009
  • fDate
    25-28 Oct. 2009
  • Firstpage
    1623
  • Lastpage
    1627
  • Abstract
    This work presents the specifications of a microsystem which allows pH electrical measurements of solution especially for water monitoring applications. The architecture of this microsystem consists in SGFET (suspended gate field effect transistor) array-based, control and processing modules. The array is composed of 3 × 3 identical SGFET sensors. Each SGFET can be addressed independently to increase the accuracy and the reliability of the global measurements.
  • Keywords
    field effect transistors; microsensors; pH measurement; SGFET sensors; pH electrical measurements; suspended gate field effect transistors array; water monitoring; Chemicals; Electric variables measurement; Electrodes; FETs; Monitoring; Polarization; Protection; Scanning electron microscopy; Sensor arrays; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2009 IEEE
  • Conference_Location
    Christchurch
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-4548-6
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2009.5398502
  • Filename
    5398502
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3286031