Title :
Development of novel Pb, Li, Na and K-free piezoelectric materials for Si-based MEMS application
Author :
Funakubo, Hiroshi ; Yasui, Shintaro ; Yazawa, Keisuke ; Nagata, Junichi ; Oikawa, Takahiro ; Yamada, Tomoaki ; Uchida, Hiroshi
Author_Institution :
Dept. of Innovative & Eng. Mater., Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
We developed the piezoelectric materials not including Pb, Li, K and Na as constituent elements. Our concern is the composition survey of the morphotropic phase boundary between tetragonal and non-tetragonal ferroelectric materials. In this approach, we must select the tetragonal ferroelectrics other than PbTiO3 and (Bi1/2K1/2)TiO3 as a end material. BiCoO3 and Bi(Zn1/2Ti1/2)O3 are novel tetragonal candidates for this purpose. We successfully grew epitaxial tetragonal films having ferroelectricity in BiCoO3-BiFeO3 and Bi(Zn1/2Ti1/2)O3-BiFeO3 systems. Based on these system, composition having maximum piezoelectric response of d33(AFM) = 280 pm/V was discovered for epitaxial films in Bi(Zn1/2Ti1/2)O3-Bi(Mg1/2Ti1/2)O3-BiFeO3 system.
Keywords :
bismuth compounds; epitaxial layers; ferroelectric ceramics; ferroelectric thin films; ferroelectricity; liquid phase epitaxial growth; piezoceramics; piezoelectric thin films; piezoelectricity; Bi(Zn0.5Ti0.5)O3-Bi(Mg0.5Ti0.5)O3-BiFeO3; ceramics; epitaxial tetragonal films; ferroelectricity; morphotropic phase boundary; piezoelectric materials; silicon-based MEMS; tetragonal-nontetragonal ferroelectric materials; Epitaxial growth; Lead; Micromechanical devices; Piezoelectric materials; Substrates; K and Na-free; Li; MEMS application; Pb; piezoelectric materials;
Conference_Titel :
Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
Conference_Location :
Aveiro
Print_ISBN :
978-1-4673-2668-1
DOI :
10.1109/ISAF.2012.6297769
