• DocumentCode
    3286277
  • Title

    Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation

  • Author

    Ozer, Zafer ; Mamedov, Amirullah M. ; Ozbay, Ekmel

  • Author_Institution
    Mersin Univ., Mersin, Turkey
  • fYear
    2012
  • fDate
    9-13 July 2012
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and BaxSr1-xTiO3) based by using finite element model (FEM) simulation.
  • Keywords
    design engineering; ferroelectric materials; finite element analysis; gyroscopes; inertial systems; FEM simulation; MEMS; ferroelectric based microgyroscope; finite element model simulation; inertial measurement unit; microelectromechanical system design; microelectromechanical system modeling; ternary ferroelectric compounds; Angular velocity; Electrodes; Finite element methods; Gyroscopes; Micromechanical devices; Sensors; Vibrations; FEM; MEMS; ferroelectrics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
  • Conference_Location
    Aveiro
  • Print_ISBN
    978-1-4673-2668-1
  • Type

    conf

  • DOI
    10.1109/ISAF.2012.6297779
  • Filename
    6297779
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3286277