DocumentCode :
3286277
Title :
Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation
Author :
Ozer, Zafer ; Mamedov, Amirullah M. ; Ozbay, Ekmel
Author_Institution :
Mersin Univ., Mersin, Turkey
fYear :
2012
fDate :
9-13 July 2012
Firstpage :
1
Lastpage :
4
Abstract :
This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and BaxSr1-xTiO3) based by using finite element model (FEM) simulation.
Keywords :
design engineering; ferroelectric materials; finite element analysis; gyroscopes; inertial systems; FEM simulation; MEMS; ferroelectric based microgyroscope; finite element model simulation; inertial measurement unit; microelectromechanical system design; microelectromechanical system modeling; ternary ferroelectric compounds; Angular velocity; Electrodes; Finite element methods; Gyroscopes; Micromechanical devices; Sensors; Vibrations; FEM; MEMS; ferroelectrics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
Conference_Location :
Aveiro
Print_ISBN :
978-1-4673-2668-1
Type :
conf
DOI :
10.1109/ISAF.2012.6297779
Filename :
6297779
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3286277
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