Title :
Pulsed laser deposited-PZT based MEMS energy harvesting devices
Author :
Jambunathan, Madhusudhanan ; Elfrink, Rene ; Vullers, Ruud ; van Schaijk, R. ; Dekkers, Matthijn ; Broekmaat, Joska
Author_Institution :
Imec/Holst Centre, Eindhoven, Netherlands
Abstract :
PZT thin films are a huge attraction in the rapid growing MEMS field, especially in the field of energy harvesting. This paper describes the PLD deposited PZT thin film growth and its integration into MEMS energy harvesting devices. We have shown a maximum power output of 51 μW with 63.6 μW/g2 sensitivity for a sinusoidal input excitation. The potential applications of these vibrational harvesters in car tires are explored by applying a shock input excitation.
Keywords :
dielectric thin films; energy harvesting; lead compounds; micromechanical devices; piezoelectric devices; pulsed laser deposition; vibrational modes; PZT; PZT thin films; power output; pulsed laser deposited-PZT based MEMS energy harvesting devices; shock input excitation; vibrational harvesters; Acceleration; Electric shock; Energy harvesting; Films; Micromechanical devices; Resonant frequency; Tires; PZT; shock excitation; vibrational energy harevsting;
Conference_Titel :
Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
Conference_Location :
Aveiro
Print_ISBN :
978-1-4673-2668-1
DOI :
10.1109/ISAF.2012.6297807
