Thin membrane transducer detectiing DNA hybridization on chip

We present a highly reliable ultra thin membrane transducer (TMT)-based chemo-mechanical sensing platform fabricated with MEMS process. This device is composed of 100 nm thick silicon nitride membrane and lower electrode for a capacitive detection. The counter electrode is integrated on a silicon substrate and the cavity side of the membrane is coated with thin gold film (30 nm) for molecular immobilization and reaction. Microfluidic flow cell is fabricated with PDMS and integrated with the chip. The TMT demonstrates the discrimination between perfect match and mismatch in hybridization with a well-defined time response due to a specific molecular recognition. The effect of concentration is investigated through the difference in response.