• DocumentCode
    3287117
  • Title

    Fabrication and electrical properties of 0.9PMN-0.1PT MIM capacitors

  • Author

    Leuliet, A. ; Jamond, N. ; Bisaro, R. ; Garry, G. ; Pham-Thi, M. ; Ziaei, A. ; Michalas, L. ; Koutsoureli, M. ; Papaioannou, G.

  • Author_Institution
    Thales Res. & Technol., Palaiseau, France
  • fYear
    2012
  • fDate
    9-13 July 2012
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper describes the fabrication and characterization of 0.9PMN-0.1PT MIM capacitors with platinum electrodes. The films have been deposited by Pulsed Laser Deposition (PLD) on a buffer layer (SrRuO3) which has been demonstrated to be essential to enhance the growth of PMN-PT instead of pyrochlore. The temperature analysis of the current voltage characteristics revealed that the dc conductivity is interface controlled due to Schottky emission. The other important parameters determining the device current are magnitude, polarity and duration of the applied bias.
  • Keywords
    MIM devices; Schottky effect; electrical conductivity; electrodes; ferroelectric capacitors; ferroelectric thin films; ferroelectricity; lead compounds; magnesium compounds; platinum; pulsed laser deposition; thin film capacitors; (1-x)PbMg1/3Nb2/3O-xPbTiO3; MIM capacitors; PLD; PbMg0.33Nb0.67O-PbTiO3-Pt; Schottky emission; buffer layer; current voltage characteristics; dc conductivity; device current; electrical properties; ferroelectric films; platinum electrodes; polarity; pulsed laser deposition; pyrochlore; temperature analysis; Buffer layers; Current measurement; Electrodes; MIM capacitors; Platinum; Pulsed laser deposition; Temperature; 0.9PMN-0.1PT; PLD high k dielectric film; Schottky barrier;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
  • Conference_Location
    Aveiro
  • Print_ISBN
    978-1-4673-2668-1
  • Type

    conf

  • DOI
    10.1109/ISAF.2012.6297830
  • Filename
    6297830