• DocumentCode
    3287335
  • Title

    Fabrication and experimental verification of a dielectrophoretic separation device

  • Author

    Zhang, L. ; Bastemeijer, J. ; Mollinger, J.R. ; Bossche, A.

  • Author_Institution
    Dept. of Microelectron., Delft Univ. of Technol., Delft, Netherlands
  • fYear
    2009
  • fDate
    25-28 Oct. 2009
  • Firstpage
    1168
  • Lastpage
    1171
  • Abstract
    In this work, we present the fabrication method and the experimental results of a dielectrophoretic (DEP) device for particle batch separation. The curved parts of serpentine microchannel that causes performance deterioration in capillary electrophoresis (CE) due to the plug dispersion are effectively used in our design for dielectrophoretic separation. The top-and-bottom focusing electrodes are employed in the intermediate straight segments to bring all the particles to the same entering point for the next curve. The device was successfully fabricated by bonding two processed substrates with an SU-8 layer sandwiched in between. The experimental results achieved thus far give a proof of concept.
  • Keywords
    adhesive bonding; bioMEMS; biological techniques; capillarity; electrophoresis; lab-on-a-chip; microchannel flow; photoresists; SU-8 layer; bonding; capillary electrophoresis; dielectrophoretic separation device; intermediate straight segments; particle batch separation; plug dispersion; serpentine microchannel; top-and-bottom focusing electrodes; Bonding; Dielectrophoresis; Dispersion; Electrodes; Electrokinetics; Fabrication; Microchannel; Microelectronics; Plugs; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2009 IEEE
  • Conference_Location
    Christchurch
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-4548-6
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2009.5398585
  • Filename
    5398585