DocumentCode
3287335
Title
Fabrication and experimental verification of a dielectrophoretic separation device
Author
Zhang, L. ; Bastemeijer, J. ; Mollinger, J.R. ; Bossche, A.
Author_Institution
Dept. of Microelectron., Delft Univ. of Technol., Delft, Netherlands
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
1168
Lastpage
1171
Abstract
In this work, we present the fabrication method and the experimental results of a dielectrophoretic (DEP) device for particle batch separation. The curved parts of serpentine microchannel that causes performance deterioration in capillary electrophoresis (CE) due to the plug dispersion are effectively used in our design for dielectrophoretic separation. The top-and-bottom focusing electrodes are employed in the intermediate straight segments to bring all the particles to the same entering point for the next curve. The device was successfully fabricated by bonding two processed substrates with an SU-8 layer sandwiched in between. The experimental results achieved thus far give a proof of concept.
Keywords
adhesive bonding; bioMEMS; biological techniques; capillarity; electrophoresis; lab-on-a-chip; microchannel flow; photoresists; SU-8 layer; bonding; capillary electrophoresis; dielectrophoretic separation device; intermediate straight segments; particle batch separation; plug dispersion; serpentine microchannel; top-and-bottom focusing electrodes; Bonding; Dielectrophoresis; Dispersion; Electrodes; Electrokinetics; Fabrication; Microchannel; Microelectronics; Plugs; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2009 IEEE
Conference_Location
Christchurch
ISSN
1930-0395
Print_ISBN
978-1-4244-4548-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2009.5398585
Filename
5398585
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