Title :
Piezoresistive and thermoelectric effects of CNT thin film patterned by EB lithography
Author :
Dau, Van Thanh ; Yamada, Takeo ; Dao, Dzung Viet ; Tung, Bui Thanh ; Hata, Kenji ; Sugiyama, Susumu
Author_Institution :
Ritsumeikan Univ., Kusatsu, Japan
Abstract :
The paper reports on characterization of piezoresistive coefficients and Seebeck effect of aligned single wall carbon nanotube (SWNT) forest film. The film was synthesized by water-assisted chemical vapour deposition (CVD), a process known as ¿super growth¿. CNT film was condensed, manually maneuvered and conveniently patterned by EB lithography to form desirable shapes. The piezoresistive coefficient was found to be two times of that of conventional bulk silicon counterpart. Measurements on Seebeck effect of the thermocouple made of Au-CNT films showed an output voltage of 7.5 ¿V/°C. These devices were fabricated on a same silicon substrate with a single CNT film.
Keywords :
Seebeck effect; carbon nanotubes; electron beam lithography; gold; piezoresistive devices; silicon; Au-C; Au-CNT films; CNT thin film; EB lithography; Seebeck effect; Si; piezoresistive coefficients; piezoresistive effects; silicon substrate; single wall carbon nanotube forest film; super growth; thermocouple; thermoelectric effects; water-assisted chemical vapour deposition; Carbon nanotubes; Chemical processes; Chemical vapor deposition; Lithography; Piezoresistance; Shape; Silicon; Thermoelectricity; Transistors; Voltage;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398590
