Piezoresistive and thermoelectric effects of CNT thin film patterned by EB lithography

Author

Dau, Van Thanh ; Yamada, Takeo ; Dao, Dzung Viet ; Tung, Bui Thanh ; Hata, Kenji ; Sugiyama, Susumu

Author_Institution

Ritsumeikan Univ., Kusatsu, Japan

fYear

2009

fDate

25-28 Oct. 2009

Firstpage

1048

Lastpage

1051

Abstract

The paper reports on characterization of piezoresistive coefficients and Seebeck effect of aligned single wall carbon nanotube (SWNT) forest film. The film was synthesized by water-assisted chemical vapour deposition (CVD), a process known as Â¿super growthÂ¿. CNT film was condensed, manually maneuvered and conveniently patterned by EB lithography to form desirable shapes. The piezoresistive coefficient was found to be two times of that of conventional bulk silicon counterpart. Measurements on Seebeck effect of the thermocouple made of Au-CNT films showed an output voltage of 7.5 Â¿V/Â°C. These devices were fabricated on a same silicon substrate with a single CNT film.

Keywords

Seebeck effect; carbon nanotubes; electron beam lithography; gold; piezoresistive devices; silicon; Au-C; Au-CNT films; CNT thin film; EB lithography; Seebeck effect; Si; piezoresistive coefficients; piezoresistive effects; silicon substrate; single wall carbon nanotube forest film; super growth; thermocouple; thermoelectric effects; water-assisted chemical vapour deposition; Carbon nanotubes; Chemical processes; Chemical vapor deposition; Lithography; Piezoresistance; Shape; Silicon; Thermoelectricity; Transistors; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2009 IEEE

Conference_Location

Christchurch

ISSN

1930-0395

Print_ISBN

978-1-4244-4548-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2009.5398590

Filename

5398590