Title :
Femtosecond infrared laser annealing of ferroelectric PZT films on a metal substrate
Author :
Firsova, N.Y. ; Mishina, E.D. ; Senkevich, S.V. ; Pronin, I.P. ; Bdikin, I.K. ; Kholkin, A.L.
Author_Institution :
Moscow State Tech. Univ. of Radioeng., Electron. & Autom. (MSTU-MIREA), Moscow, Russia
Abstract :
Ti-sapphire femtosecond laser was utilized to crystallize Pb(Zr0,54, Ti0,46)O3 (PZT) film on platinized silicon substrate. Second harmonic generation was used to in-situ monitor of the annealing process and to confirm a non-centrosymmetric perovskite ferroelectric phase of the irradiated area. Piezo-force microscopy technique allowed us to investigate local polarization properties of annealed areas.
Keywords :
annealing; crystallisation; dielectric polarisation; ferroelectric thin films; harmonic generation; high-speed optical techniques; laser beam effects; lead compounds; PZT; Si; crystallization; femtosecond infrared laser annealing process; ferroelectric PZT films; high energy femtosecond laser radiation; local polarization properties; metal substrate; noncentrosymmetric perovskite ferroelectric phase; piezo-force microscopy; platinized silicon substrate; second harmonic generation; titanium-sapphire femtosecond laser; Annealing; Films; Frequency conversion; Lasers; Measurement by laser beam; Substrates; Ultrafast electronics; Raman scattering; Sol-gel; femtosecond laser annealing; ferroelectric; piezoelectric; second harmonic generation; thin films;
Conference_Titel :
Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
Conference_Location :
Aveiro
Print_ISBN :
978-1-4673-2668-1
DOI :
10.1109/ISAF.2012.6297852
