Title :
Analysis of Kinetic Phenomenon in Polysilicon (Part 3)
Keywords :
Charge carriers; Electromagnetic scattering; Inspection; Kinetic theory; Magnetic field measurement; Magnetic sensors; Optical scattering; Rayleigh scattering; Surface resistance; US Department of Energy;
Conference_Titel :
Electronic Instrument Engineering, 2006. APEIE '06. 8th International Conference on Actual Problems of
Conference_Location :
Novosibirsk, Russia
Print_ISBN :
5-7782-0662-3
DOI :
10.1109/APEIE.2006.4292441
