DocumentCode
3288168
Title
Multislot MW Irradiator for Intracavity Treatment
Author
Belavskaya, S.V. ; Rodionov, A.S. ; Lisityna, L.I. ; Plavsky, L.G. ; Vostryakov, Yu.V.
fYear
2006
fDate
26-28 Sept. 2006
Firstpage
265
Lastpage
265
Keywords
Biological tissues; Electrodes; Etching; Plasma applications; Plasma chemistry; Plasma devices; Plasma materials processing; Plasma properties; Silicon; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering, 2006. APEIE '06. 8th International Conference on Actual Problems of
Conference_Location
Novosibirsk, Russia
Print_ISBN
5-7782-0662-3
Type
conf
DOI
10.1109/APEIE.2006.4292450
Filename
4292450
Link To Document